Array of Micromachined Components Fabricated Using “Micro-Origami” Method

A 2-D array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called "micro-origami". The array is fabricated by epitaxial growth of III-V multilayers on GaAs substrates followed by photolithography and wet etching. The structures move...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 6B), p.4024-4026
Hauptverfasser:	Vorob'ev, Alexander, Vaccaro, Pablo, Kubota, Kazuyoshi, Saravanan, Shanmugam, Aida, Tahito
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!