Array of Micromachined Components Fabricated Using “Micro-Origami” Method

Array of Micromachined Components Fabricated Using “Micro-Origami” Method

A 2-D array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called "micro-origami". The array is fabricated by epitaxial growth of III-V multilayers on GaAs substrates followed by photolithography and wet etching. The structures move...

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Veröffentlicht in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 6B), p.4024-4026
Hauptverfasser: Vorob'ev, Alexander, Vaccaro, Pablo, Kubota, Kazuyoshi, Saravanan, Shanmugam, Aida, Tahito
Format: Artikel
Sprache:eng
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Zusammenfassung:A 2-D array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called "micro-origami". The array is fabricated by epitaxial growth of III-V multilayers on GaAs substrates followed by photolithography and wet etching. The structures move to their final position during the process. Future applications of micromachined structures obtained by this method are discussed. 6 refs.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.4024