Optical Properties of the SiO–Co Composite Thin Films

Optical Properties of the SiO–Co Composite Thin Films

Spectroscopic ellipsometry (SE) and XPS were employed to study the composite thin films of SiO and Co prepared by sputtering technique. The optical properties of these films could be expressed as mixtures of SiO and Co using effective medium approximation (EMA) by Bruggeman. When the compositional p...

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Veröffentlicht in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 3), p.1416-1417
Hauptverfasser: Lee, Jaeho, Bang, Kyoung-Yoon, Kim, Ok-Kyung, Oh, Hye-Keun, An, Ilsin, Choi, Chaungi, Park, Chang-Won
Format: Artikel
Sprache:eng
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Zusammenfassung:Spectroscopic ellipsometry (SE) and XPS were employed to study the composite thin films of SiO and Co prepared by sputtering technique. The optical properties of these films could be expressed as mixtures of SiO and Co using effective medium approximation (EMA) by Bruggeman. When the compositional properties of films analyzed by EMA and XPS were compared, the optical volume of SiO was found to be 5.47 times greater than that of Co. 22 refs.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.1416