Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method
This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing...
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Veröffentlicht in: | Microelectronic engineering 2003-06, Vol.67, p.702-709 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/S0167-9317(03)00175-8 |