Preparation and characterization of highly (111)-oriented (Pb, La)(Zr, Ti)O3 thin films by sol-gel processing

Lanthanum modified lead zirconate titanate (Pb0.91La0.09)(Zr0.65Ti0.35)O3 (PLZT) ferroelectric thin films were grown on Pt/Ti/SiO2/Si(100) and fused quartz substrates using a sol-gel method with rapid thermal annealing processing. The results showed that the highly (111)-oriented pervoskite PLZT thi...

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Veröffentlicht in:	Thin solid films 2003, Vol.423 (1), p.13-17
Hauptverfasser:	TANG, X. G, DING, A. L, YE, Y, CHEN, W. X
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Materials science Methods of deposition of films and coatings film growth and epitaxy Niobates, titanates, tantalates, pzt ceramics, etc Physics
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