Sputtering in a glow discharge lamp of the Grimm type

The sputtering rate (Q), in glow discharge, was measured as a function of the discharge power (W). An empirical relation could be obtained having the form $Q = K^{**} W^m$, with the constants $K^{**}$ and m. The equation was compared with theoretical derived equation of Takatsu and Toda, which is based on the mechanism of momentum transfer. Takatsu and Toda theoretical relationship had to be rearranged to obtain the same relationship between the sputtering rate (Q) and the discharge (W). The experimental data obtained in the present work as well as by Boumans and Takatsu and Toda were analysed on the bases of the obtained equation. This analysis revealed that the constants appearing in the Q-W equations are pressure dependent. These dependences are described and discussed.