International Standardization of EPMA, AEM, SEM Analysis and Measurements

The product development involving addition of functions with high added value to surface or micro-regions of materials is becoming a main stream. Needs for evaluation technology of surface analysis with high sensitivity and microanalysis are increasing. ISO started activity to make standards in 1992 and TC202, of which covered territory is analysis with equal and under 10 *mm depth and equal and below 100 *mm2 area, was formed internationally. Related instruments are EPMA, AEM, SEM, and EDS. A paper explains activities of four Sub-Groups (SG) formed for deliberation of methods of EPMA, AEM, SEM, and EDS for standardization. The process for making drafts is starting from working draft (WD), passing of stages of drafts of the committee (CD) and inquiry draft (DIS), and the final international standard draft (FDIS). The present state in progress of working is explained for four SGs, respectively.