Heteroepitaxy of Hexagonal ZnS Thin Films Directly on Si (111)
Epitaxial wurtzite ZnS (W-ZnS) films were grown directly on Si (111) at temperatures as high as 800 C by PLD. A deconvolution method was used to discriminate the ZnS reflection from superimposed peaks overlapped by both ZnS and Si peaks in X-ray measurement. From the peak deconvolution, the rocking...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 11), p.7029-7032 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Epitaxial wurtzite ZnS (W-ZnS) films were grown directly on Si (111) at temperatures as high as 800 C by PLD. A deconvolution method was used to discriminate the ZnS reflection from superimposed peaks overlapped by both ZnS and Si peaks in X-ray measurement. From the peak deconvolution, the rocking FWHM and lattice constant of the ZnS film were determined to be 0.28 degrees and 6.26 angstroms, resp. A tilt between W-ZnS and Si was observed and the tilt angle decreased with increasing growth temperature. The W-ZnS (0001) film on Si (111) showed the epitaxial relationship of Si [220]/ /ZnS[10-15]. An powder XRD scan along the L direction in reciprocal space and a high-resolution TEM image revealed that the W-ZnS film partially had stacking fault domains in the hexagonal phase. Free excitonic emission from the W-ZnS film was observed at 4 K. 20 refs. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.42.7029 |