Growth and Characterization of a Porous Aluminum Oxide Film Formed on an Electrically Insulating Support

Growth and Characterization of a Porous Aluminum Oxide Film Formed on an Electrically Insulating Support

Thin films of porous anodic Al2O3 were prepared on an electrically insulating support by the anodisation of Al films sputtered onto glass slides. The resulting transparent Al2O3 films were characterised by SEM and variable angle ellipsometry. Subsequently, the film was modelled from the ellipsometri...

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Veröffentlicht in:Electrochemical and solid-state letters 2003-01, Vol.6 (10), p.B42-B45
Hauptverfasser: Miney, Paul G., Colavita, Paula E., Schiza, Maria V., Priore, Ryan J., Haibach, Frederick G., Myrick, Michael L.
Format: Artikel
Sprache:eng
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Zusammenfassung:Thin films of porous anodic Al2O3 were prepared on an electrically insulating support by the anodisation of Al films sputtered onto glass slides. The resulting transparent Al2O3 films were characterised by SEM and variable angle ellipsometry. Subsequently, the film was modelled from the ellipsometric data taken. An underlying conductive medium is not necessarily needed to bring about nearly complete anodisation of the Al layer. 23 refs.
ISSN:1099-0062
DOI:10.1149/1.1602332