HgCdTe on Si: Present status and novel buffer layer concepts
Authors discuss buffer-layer concepts for the synthesis of low defect-density HgCdTe epilayers on Si for both hybrid and monolithically integrated, ir focal plane arrays (IRFPAa). The primary technical problems to overcome include the 19% lattice-parameter mismatch between HgCdTe and Si, and the (21...
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Veröffentlicht in: | Journal of electronic materials 2003-08, Vol.32 (8), p.882-889 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Authors discuss buffer-layer concepts for the synthesis of low defect-density HgCdTe epilayers on Si for both hybrid and monolithically integrated, ir focal plane arrays (IRFPAa). The primary technical problems to overcome include the 19% lattice-parameter mismatch between HgCdTe and Si, and the (211)B surface orientation required for MBE, the growth technique of choice for HgCdTe. Authors provide a general overview of IRFPAs, motivations for realizing HgCdTe on Si, the current state-of-the-art parameters as a baseline, and three novel buffer-layer concepts and technologies based on (1) obedient GeSi films on SiO2, (2) wafer bonding, and (3) chalcogenides. 28 refs. |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/s11664-003-0205-0 |