Growth of Carbon Nanotube by Thermal Chemical Vapor Deposition at Low Temperature with FeZrN Film

Recently, the direct growth of C nanotubes on a glass substrate by thermal CVD at low temperatures has been studied for the fabrication of field emission displays (FEDs). Authors achieved the synthesis of C nanotubes on soda lime glass at low temperatures (500-550 C) by a novel granulation method using FeZrN film. The FeZrN film is amorphia direct after sputtering, however, it changes into crystalloid to separate out Fe fine particles by thermal treatment. The characteristic was applied to make the precursor of C nanotubes. The emission was also obtained and the turn-on electron field was approximately 3 V/mu m. 14 refs.