Nanostructure Formation on a Surface of 6H-SiC by Laser Radiation

Nano-hills formation on a surface of 6H-SiC by the N2 laser focused beam was found. These nano-hills are situated along the circular line with diameter smaller than that of the focused laser beam. Results of the photoluminescence and studies of Friction Force Microscopy speak in favor of the increase of nitrogen concentration in the nano-hills. For explanation of this phenomenon the pressure of liquid matter in the subsurface area and the pressure of the laser beam on the surface of the sample are taken into account. The threshold character of the effect, accumulation effect and increase of N band on PL spectra testify to the main role of the thermogradient effect in this phenomenon.