Low Temperature Processing of Crystalline Lead Zirconate Titanate (PZT) Film and the Direct Micropatterning by Laser-Induced Pyrolysis of a Sol-Gel-Derived Film
A novel low-temperature processing of crystalline PZT film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT microp...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2003-07, Vol.42 (Part 2, No. 7B), p.L843-L845 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A novel low-temperature processing of crystalline PZT film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT. 14 refs. |
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| ISSN: | 0021-4922 |
| DOI: | 10.1143/JJAP.42.L843 |