Dielectric properties and tunability of Mg-doped Ba0.96Ca0.04Ti0.84Zr0.16O3 thin films on Pt/MgO fabricated by metal organic decomposition method

Mg-doped Ba0.96Ca0.04Ti0.84Zr0.16O3 (BCTZ) thin films were fabricated on Pt/MgO substrate by metallorganic decomposition (MOD). The structures were analysed by XRD. The electrical measurements were performed on metal-ferroelectric-metal capacitors with platinum as the top and bottom electrode. The d...

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Veröffentlicht in:	Materials letters 2003-09, Vol.57 (26-27), p.4147-4150
Hauptverfasser:	KALKUR, T. S, YI, Woo-Chul, PHILOFSKY, Elliott, KAMMERDINER, Lee
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric properties of solids and liquids Dielectric thin films Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Niobates, titanates, tantalates, pzt ceramics, etc Permittivity (dielectric function) Physics
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Zusammenfassung:	Mg-doped Ba0.96Ca0.04Ti0.84Zr0.16O3 (BCTZ) thin films were fabricated on Pt/MgO substrate by metallorganic decomposition (MOD). The structures were analysed by XRD. The electrical measurements were performed on metal-ferroelectric-metal capacitors with platinum as the top and bottom electrode. The dielectric properties were improved after the capacitors were post annealed at 700 C in oxygen atmosphere for 30 min. A high dielectric constant of 504 and a dissipation factor of less than 4% were obtained at 1 MHz. The Pt /BCTZ/Pt/MgO capacitors exhibited high tunability of 55% at an applied field of 55 kV/cm. 20 refs.
ISSN:	0167-577X 1873-4979
DOI:	10.1016/S0167-577X(03)00280-5