Condensed phase equilibria in transition Metal-Ga-Sb systems and predictions for thermally stable contacts to GaSb

To assist with the design of shallow or thermally stable contacts, authors have performed thermodynamic calculations to estimate ternary phase equilibria in many of the transition metal-Ga-Sb systems. Authors have used the results of calculations and a limited number of experiments to identify candidates for nonreactive elemental contacts to GaSb. Both W and Re are in thermodynamic equilibrium with GaSb under the conditions considered in this study. Metal gallides and antimonides that are candidates for thermally stable contacts to GaSb are also highlighted. 58 refs.