Atomic force microscopy analysis of buckling phenomena in metallic thin films on substrates

In this letter, we would like to underline the interest of AFM investigations for small blister size (first bulking stage). In this way, we present first results concerning in-plane residual stresses obtained on 200 nm thick Ni and Mo films deposited by ion beam sputtering on polycarbonate and thick...

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Veröffentlicht in:	Journal of materials science letters 2000, Vol.19 (4), p.353-355
Hauptverfasser:	BRANGER, V, COUPEAU, C, GOUDEAU, P, BOUBEKER, B, BADAWI, K. F, GRILHE, J
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Physics
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