sCMOS Camera Designs Push the Limits on Resolution

Applications ranging from astronomy to the life sciences to semiconductor manufacturing and metrology have steadily increased the demand for camera technologies targeting the extreme-ultraviolet (EUV) and even the soft x-ray regimes. Many of these potential implementations impose the usual considerations around minimizing camera size. But the comparatively high-energy photons that characterize the targeted spectral ranges further demand camera designs that deliver a higher degree of protection against potentially damaging radiation. To capitalize on the promise of new applications in the EUV and soft x-ray wavelength ranges, new sensor technologies and camera designs must evolve to meet these challenges.