STABILIZATION OF ZrSixOy FILMS BY IRRADIATION WITH AN ArF EXCIMER LASER

Authors analyzed the films chemically and physically. The phase shift and the transmittance of a transmissive film with a high O concentration increases and decreases, resp., with irradiation. This is because of an increase of Si-O-Zr bond structures. The phase shift and the transmittance of an abso...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 7B, pp. 4561-4566. 2000 Part 1. Vol. 39, no. 7B, pp. 4561-4566. 2000, 2000, Vol.39 (7B), p.4561-4566
Hauptverfasser:	Nakazawa, K, Matsuo, T, Onodera, T, Ogawa, T, Morimoto, H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!