Sputtering: the material erosion tool

The erosion of materials with energetic ions is an indispensable tool in the laboratory and the industry. The ion–solid collision process leading to the ejection of atoms contains fascinating physics and materials science of surfaces. In this article, different aspects of sputtering relevant to appl...

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Veröffentlicht in:	Surface science 2002-03, Vol.500 (1-3), p.523-544
1. Verfasser:	Murty, M.V.Ramana
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Ion etching Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Secondary ion mass spectroscopy Sputter deposition Sputtering Surface structure, morphology, roughness, and topography
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Beschreibung
Zusammenfassung:	The erosion of materials with energetic ions is an indispensable tool in the laboratory and the industry. The ion–solid collision process leading to the ejection of atoms contains fascinating physics and materials science of surfaces. In this article, different aspects of sputtering relevant to applications are discussed. Current research is emphasized and future directions are outlined.
ISSN:	0039-6028 1879-2758
DOI:	10.1016/S0039-6028(01)01586-2