Preparation and properties of photosensitive polyimide /titana-silica hybrid materials

A complex inorganic-polymer hybrid material of polyimide /titania-silica with photolithographic property was prepared by sol-gel process. Polyimide (PT) was based on benzophone-3,3',4,4'-tetracarboxylic dianhydride (BTDA) and 4,4'-diamino-3,3'-dimethyl- diphenylmethane (MMDA) and...

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Veröffentlicht in:Materials Science and Engineering C: Biomimetic Materials, Sensors and Systems (Switzerland) Sensors and Systems (Switzerland), 2002-10, Vol.C22 (1), p.61-65
Hauptverfasser: Liu, L, Lu, Q, Yin, J, Zhu, Z, Pan, D, Wang, Z
Format: Artikel
Sprache:eng
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Zusammenfassung:A complex inorganic-polymer hybrid material of polyimide /titania-silica with photolithographic property was prepared by sol-gel process. Polyimide (PT) was based on benzophone-3,3',4,4'-tetracarboxylic dianhydride (BTDA) and 4,4'-diamino-3,3'-dimethyl- diphenylmethane (MMDA) and is negatively photosensitive. The introduction of titania leads to increased refractive index while the introduction of silica leads to improved thermal stability of the hybrid.
ISSN:0928-4931