Preferred orientation and hardness enhancement of TiN/CrN superlattice coatings deposited by reactive magnetron sputtering

TiN/CrN superlattice coatings with various bilayer periods are deposited by reactive magnetron sputtering. The preferred orientations of the superlattices can be controlled through selecting either (2 0 0)-oriented TiN or (1 1 1)-oriented CrN as the starting layer for deposition. Changing the prefer...

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Veröffentlicht in:	Scripta materialia 2002-02, Vol.46 (4), p.293-297
Hauptverfasser:	Yang, Q., He, C., Zhao, L.R., Immarigeon, J-P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Hardness Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Preferred orientation Sputtering Superlattice
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Zusammenfassung:	TiN/CrN superlattice coatings with various bilayer periods are deposited by reactive magnetron sputtering. The preferred orientations of the superlattices can be controlled through selecting either (2 0 0)-oriented TiN or (1 1 1)-oriented CrN as the starting layer for deposition. Changing the preferred orientation from (1 1 1) to (2 0 0) can significantly increase hardness enhancements.
ISSN:	1359-6462 1872-8456
DOI:	10.1016/S1359-6462(01)01241-6