PREPARATION OF Pb(Zr, Ti)O3 THIN FILMS ON GLASS SUBSTRATES

Lead-zirconate-titanate (PZT) thin films were prepared on nonalkaline glass substrates widely used in liquid crystal display (LCD) devices by plasma-assisted magnetron RF sputtering with an immersed coil. After preparation of the PZT thin film, the glass was available for use in LCD device processin...

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Veröffentlicht in:	Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5408-5412. 2000 Part 1. Vol. 39, no. 9B, pp. 5408-5412. 2000, 2000, Vol.39 (9B), p.5408-5412
Hauptverfasser:	Hioki, T, Akiyama, M, Ueda, T, Onozuka, Y, Hara, Y, Suzuki, K
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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