Physical Origins of Intrinsic Stresses in Volmer–Weber Thin Films

As-deposited thin films grown by vapor deposition often exhibit large intrinsic stresses that can lead to film failure. While this is an “old” materials problem, our understanding has only recently begun to evolve in a more sophisticated fashion. Sensitive real-time measurements of stress evolution...

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Veröffentlicht in:	MRS bulletin 2002-01, Vol.27 (1), p.19-25
Hauptverfasser:	Floro, Jerrold A., Chason, Eric, Cammarata, Robert C., Srolovitz, David J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Compressive properties Film growth Grain boundaries Grain growth intrinsic stress Nucleation physical vapor deposition Stresses Technical Feature Thin films Vapor deposition
Online-Zugang:	Volltext
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