One transistor ferroelectric memory with Pt/Pb5Ge3O11/Ir/Poly-Si /SiO2/Si gate stack

One transistor ferroelectric nonvolatile memory with gate stack of Pt/Pb5Ge3 O11/Ir/Poly-Si/SiO2/Si was successfully fabricated. This device features a saturated memory window of 3 V at a programming voltage of higher than 3 V from CV and IV measurements. The memory window decays rapidly within 10 s...

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Veröffentlicht in:IEEE electron device letters 2002-06, Vol.23 (6), p.339-341
Hauptverfasser: Li, T, Hsu, S T, Ulrich, B D, Stecker, L, Evans, D R, Lee, J J
Format: Artikel
Sprache:eng
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Zusammenfassung:One transistor ferroelectric nonvolatile memory with gate stack of Pt/Pb5Ge3 O11/Ir/Poly-Si/SiO2/Si was successfully fabricated. This device features a saturated memory window of 3 V at a programming voltage of higher than 3 V from CV and IV measurements. The memory window decays rapidly within 10 s after programming, but remains stable at 1 V for up to 100 h. The "on" and "off" state currents are greater than 10 micro-A/micron and less 0.01 pA/micron, respectively, at a drain voltage of 0.1 V. (Author)
ISSN:0741-3106
DOI:10.1109/LED.2002.1004228