One transistor ferroelectric memory with Pt/Pb5Ge3O11/Ir/Poly-Si /SiO2/Si gate stack
One transistor ferroelectric nonvolatile memory with gate stack of Pt/Pb5Ge3 O11/Ir/Poly-Si/SiO2/Si was successfully fabricated. This device features a saturated memory window of 3 V at a programming voltage of higher than 3 V from CV and IV measurements. The memory window decays rapidly within 10 s...
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Veröffentlicht in: | IEEE electron device letters 2002-06, Vol.23 (6), p.339-341 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | One transistor ferroelectric nonvolatile memory with gate stack of Pt/Pb5Ge3 O11/Ir/Poly-Si/SiO2/Si was successfully fabricated. This device features a saturated memory window of 3 V at a programming voltage of higher than 3 V from CV and IV measurements. The memory window decays rapidly within 10 s after programming, but remains stable at 1 V for up to 100 h. The "on" and "off" state currents are greater than 10 micro-A/micron and less 0.01 pA/micron, respectively, at a drain voltage of 0.1 V. (Author) |
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ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2002.1004228 |