INITIAL STAGE OF FILM GROWTH OF PULSED LASER DEPOSITED YMnO3

To improve the polarization-electric field (P-E) characteristic of pulsed laser deposited YMnO3 film, the initial stage of the film growth was studied. Authors confirmed that an Y-rich layer with poor crystallinity was formed at the initial stage of film growth, and this resulted in the large orientation distribution of the films. Stoichiometric YMnO3 films without an Y-rich layer were successfully obtained by optimizing the laser power density, O gas pressure, and use of ozone gas. Eventually, the P-E characteristic of the YMnO3 film was improved. 8 refs.