Influence of melt convection on the interface during Czochralski crystal growth
During the growth process of single bulk crystals from melt, the defect density is strongly affected by the shape of the melt/crystal interface. The shape of the interface is governed by the construction of the growth equipment including the heating system and the convection in the melt. In this pap...
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Veröffentlicht in: | Solid-state electronics 2000-05, Vol.44 (5), p.825-830 |
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Sprache: | eng |
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