High-sensitivity photodetectors with on-chip pinhole for laser scanning microscopy

High-sensitivity photodetectors with on-chip pinhole for laser scanning microscopy

We manufactured new high-sensitivity solid-state detectors, specifically designed for measurements in laser scanning microscopy (LSM). These single-photon avalanche diodes (SPAD's) improve the performance achievable with an LSM apparatus in the optical inspection of microelectronic devices and...

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Veröffentlicht in:IEEE transactions on electron devices 2000-07, Vol.47 (7), p.1472-1476
Hauptverfasser: Zappa, F., Ghioni, M., Zappa, R., Drodofsky, U.
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Photodetectors
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container_title IEEE transactions on electron devices
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creator Zappa, F.
Ghioni, M.
Zappa, R.
Drodofsky, U.
description We manufactured new high-sensitivity solid-state detectors, specifically designed for measurements in laser scanning microscopy (LSM). These single-photon avalanche diodes (SPAD's) improve the performance achievable with an LSM apparatus in the optical inspection of microelectronic devices and circuits. Innovative detector structures that incorporate an on-chip pinhole filter are presented. Experimental measurements show that SPAD's perform better than standard photomultiplier tubes.
doi_str_mv 10.1109/16.848295
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title High-sensitivity photodetectors with on-chip pinhole for laser scanning microscopy
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