Modelling and simulation for dielectric constant of aerogel

Aerogel exhibits several attractive features as an interconnect dielectric in ULSI, because of its ultralow dielectric constant ( ϵ eff=1∼4.2), high dielectric strength, and good gapfill capabilities. In this paper, a uniformly distributed pore structure model which shows a significant improvement c...

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Veröffentlicht in:	Microelectronic engineering 2000-12, Vol.54 (3), p.295-301
Hauptverfasser:	Xiao, Xia, Streiter, Reinhard, Ruan, Gang, Song, Renru, Otto, Thomas, Gessner, Thomas
Format:	Artikel
Sprache:	eng
Schlagworte:	Aerogel Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronics Exact sciences and technology Materials Permittivity (dielectric function) Physics Porosity
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container_title	Microelectronic engineering
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creator	Xiao, Xia Streiter, Reinhard Ruan, Gang Song, Renru Otto, Thomas Gessner, Thomas
description	Aerogel exhibits several attractive features as an interconnect dielectric in ULSI, because of its ultralow dielectric constant ( ϵ eff=1∼4.2), high dielectric strength, and good gapfill capabilities. In this paper, a uniformly distributed pore structure model which shows a significant improvement compared with parallel and serial models is presented to simulate the ϵ eff of aerogel. An empirical relation between the ϵ eff of aerogel and its porosity is obtained. At the same time, the effect of porosity, pore shape, pore size, pore-size distribution and pore distribution on the ϵ eff of aerogel is determined. It is found that the porosity is a major factor which affects ϵ eff.
doi_str_mv	10.1016/S0167-9317(00)00257-4
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subjects	Aerogel Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronics Exact sciences and technology Materials Permittivity (dielectric function) Physics Porosity
title	Modelling and simulation for dielectric constant of aerogel
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