Formation of functional ceramic films with ultrafine particle beams

Formation of functional ceramic films with ultrafine particle beams

Piezoelectric lead zirconate titanate [PZT: (Pb(Zr sub 052 , Ti sub 0.48 )O sub 3 )] is utilized for sensors and actuators in micro electromechanical systems. Anatase type titania (TiO sub 2 ) is a photocatalyst and has antibiotic and deodorization properties. In this study we have developed deposit...

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Veröffentlicht in:Transactions of JWRI 2000-12, Vol.29 (2), p.107-108
Hauptverfasser: Tsukamoto, M, Abe, N, Miyake, S, Fujihara, T, Umemura, S, Nakayama, T, Morimoto, J
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Sprache:eng
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Zusammenfassung:Piezoelectric lead zirconate titanate [PZT: (Pb(Zr sub 052 , Ti sub 0.48 )O sub 3 )] is utilized for sensors and actuators in micro electromechanical systems. Anatase type titania (TiO sub 2 ) is a photocatalyst and has antibiotic and deodorization properties. In this study we have developed deposition technology for these functional ceramics on stainless steel plate using ultrafine particle beams. Materials used: SUS304 stainless steel.
ISSN:0387-4508