Fabrication of Micro-Pyramidal Probe Array with Aperture for Near-Field Optical Memory Applications
A new optical memory system is urgently required to realize high memory capacity and fast data transfer rates in the coming multimedia era. To overcome the current capacity barrier of far-field techniques, a novel near-field optical memory of evanescent wave has been proposed using a vertical cavity...
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Veröffentlicht in: | JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP 2000, Vol.39 (3S), p.1538-1541 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A new optical memory system is urgently required to realize high
memory capacity and fast data transfer rates in the coming
multimedia era. To overcome the current capacity barrier of
far-field techniques, a novel near-field optical memory of
evanescent wave has been proposed using a vertical cavity surface
emitting laser (VCSEL) probe array, consisting of the VCSEL array as
a light source and the micro-pyramidal probe array as an evanescent
wave exit. The design and fabrication for the aperture probe array
were developed in this research. An array of up to 10,000 pieces was
prepared successfully using microfabrication processes, including
photolithography, silicon wet etching, thermal oxidation and thin
film deposition. The pyramidal probes in the array show little
variation in size and are sufficiently sharp to apply to the
near-field recording head. The probe tip has a small size of 100 nm
and the aperture has a diameter of around 150 nm. A smaller
aperture can be fabricated with more careful control of the
experimental procedures, including the etching process and thermal
wet oxidation. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.39.1538 |