Design considerations and experimental analysis of high-voltage SiC Schottky barrier rectifiers

Practical design of high-voltage SiC Schottky rectifiers requires an understanding of the device physics that affect the key performance parameters. Forward characteristics of SiC Schottky rectifiers follow thermionic emission theory and are relatively well understood. However, the reverse characteristics are not well understood and have not been experimentally investigated in-depth. In this paper we report the analysis and experimental results of both the forward and reverse characteristics of high-voltage SiC Schottky rectifiers. Ti and Ni Schottky rectifiers with boron implant edge termination were fabricated on n-type 4H SiC samples. Ni Schottky rectifiers fabricated on a 13-/spl mu/m thick 3.5/spl times/10/sup 15/ cm/sup -3/ epilayer have a current density of 100 A/cm/sup 2/ at approximately 2 V forward bias and a reverse leakage current density of less than 0.1 A/cm/sup 2/ at a reverse bias of 1720 V. The reverse leakage current is observed to depend on device area, Schottky barrier height, electric field at the metal-semiconductor interface, and temperature (a decreasing temperature dependence with increasing reverse bias). In addition. the reverse leakage current magnitude is larger and the electric field dependence is stronger than predicted by thermionic emission and image-force barrier height lowering. This suggests the reverse leakage current is due to a combination of thermionic field emission and field emission.