Dielectric Properties of Internal Capacitors in Co-fired Ceramic Substrates

Dielectric properties of barium titanate-based internal capacitors characterized by capacitance, dissipation factor, and temperature change in capacitance are reported. A capacitance of about 10 nF/cm 2 with the dissipation factor of 2.3% is obtained for the BaTi 0.975 O 3 +2 wt% LiF internal capacitor after being co-fired with low dielectric constant ceramic substrates at 900°C. The percent change of capacitance is confined within ±10%. The dissipation factor is stable and decreases with increasing temperature.