Computer simulation of multicomponent ion beam enhanced deposition of (TiMo) N films

A Monte Carlo computer simulation code has been developed to describe the behavior of incident particles and the growth of (TiMo) N films in the multicomponent ion beam enhanced deposition process, which combines bombardment with a multicomponent ion beam of N ++Mo + and sputter deposition of a Ti f...

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Veröffentlicht in:	Surface & coatings technology 1998-11, Vol.110 (1), p.1-3
Hauptverfasser:	Guoqing, Li, Tengcai, Ma, Tao, Zhang, Baoyin, Tang, Chu, Paul K.
Format:	Artikel
Sprache:	eng
Schlagworte:	(TiMo)N films Computer simulation Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Ion beam enhanced deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
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