Electrochemical micromachining: the opportunities and challenges of through-mask electrochemical micromachining

Electrochemical machining (ECM) is practiced in aerospace, automobile, and other heavy industries for shaping, milling, and deburring, and finishing operations. Application of ECM in microfabrication and in the processing of thin films is referred to as electrochemical micromachining (EMM). EMM is now receiving considerable attention in the electronics and other high-tech industries, particularly as an alternate method of processing metallic parts. The opportunities and challenges of through-mask electrochemical micromachining in the fabrication of microcomponents, particularly as a high speed, environmentally friendly process, are described. A unique feature of EMM is its ability to provide microsmooth and electropolished surfaces without inducing mechanical and/or thermal stresses.