Structural investigation of Pt-Al sub 2 O sub 3 co-sputtered nano-cermet films studied by small angle x-ray scattering, grazing angle x-ray reflectometry, TEM and AFM

The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt-Al sub 2 O sub 3 granular films with thickness, metal concentrational and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry (GAXR), small angle X-ray scattering (SAXS), transmission electron microscopy and atomic force microscopy. The experimental results show that: (1) the diameter of platinum nanoparticles increases as a function of film thickness, annealing temperature and metal concentration: and (2) a columnar growth is observed whose morphology is depending also on the previous parameters and on the growth direction. Substrates included stainless steel.