A fiber-optic reflective displacement micrometer

A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV μm −1 and a resolution as low as 0.01 μm is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair ( A and B) of identical receiving fibers a...

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Veröffentlicht in:Sensors and actuators. A. Physical. 1995, Vol.49 (1), p.51-55
Hauptverfasser: Ko, Wen H., Chang, Kow-Ming, Hwang, Gwo-Jen
Format: Artikel
Sprache:eng
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Zusammenfassung:A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV μm −1 and a resolution as low as 0.01 μm is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair ( A and B) of identical receiving fibers and photodetectors that detects the light reflected from the surface being measured. The differential signal ( A − B) of the detectors is proportional to the displacement of the surface relative to a null position. The light intensity variation of the source and the reflectance change of the surface are compensated when the ( A − B) signal is divided by the sum ( A + B). The resolution is limited by noise and interference (vibration of the base). A resolution of 0.01 μm can be achieved at narrow signal bands (d.c. to 3 Hz) excluding the low-frequency noise and vibration. The range, sensitivity and non-linearity can be adjusted according to the theory. The micrometer offers the advantages of non-contact, no electrical interference, simplicity, low cost and portability. It can be used in medical experiments and laboratory instruments.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(95)01018-V