Revisiting the Fabry–Perot reflectivity method for mid-infrared optical index measurement: case study of InGaAs, AlInAs, and InP

We revisit the Fabry–Perot (FP) reflectivity method to measure optical indices in the mid-infrared spectrum. This simple approach can be readily implemented using a standard Fourier transform infrared spectrometer. Measuring samples with multiple heights allows for enhanced precision of the measurement, making the FP method consistent in values and uncertainties with more advanced ellipsometric measurements. An extensive discussion about experimental errors is carried out. Results between 4 and 12 µm for AlInAs, n-doped InGaAs, and InP, which are the most standard materials for quantum cascade lasers, are given.