Crystal structure of GeTe and Ge sub(2)Sb sub(2)Te sub(5) meta-stable phase

Direct X-ray diffraction measurement of the erased state of the Ge-Sb-Te recording layer in a four-layered phase change optical disk, which was produced by an optical disk drive, was performed. It was identified as an fcc crystal structure. In order to carry out the detailed crystal structure analys...

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Veröffentlicht in:Thin solid films 2000-01, Vol.370 (1), p.258-261
Hauptverfasser: Nonaka, Toshihisa, Ohbayashi, Gentaro, Toriumi, Yoshiharu, Mori, Yuji, Hashimoto, Hideki
Format: Artikel
Sprache:eng
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Zusammenfassung:Direct X-ray diffraction measurement of the erased state of the Ge-Sb-Te recording layer in a four-layered phase change optical disk, which was produced by an optical disk drive, was performed. It was identified as an fcc crystal structure. In order to carry out the detailed crystal structure analysis by the powder X-ray diffraction method with Rietveld refinements, somewhat larger amount of the fcc crystal powder was prepared from deposited 10 mu m thick films. It revealed that Ge sub(2)Sb sub(2)Te sub(5) belongs to the NaCl type structure (Fm3 m) with the 4a site including 20% vacancies. The conclusion was supported by the results of the density measurements with Grazing Incidence of X-ray Reflectivity.
ISSN:0040-6090