Continuous YBCO deposition onto moved tapes in liquid single source MOCVD systems

In a small scale MOCVD system YBCO films with j c(77 K) > 1 MA were deposited onto substrates, which were continuously moved through the deposition chamber. Two routes for the buffer layer deposition onto textured Ni tapes were chosen: a) CeO 2, LaMnO 3 and LaCrO 3 films were deposited in hydroge...

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Veröffentlicht in:Physica. C, Superconductivity Superconductivity, 2000, Vol.341, p.2477-2478
Hauptverfasser: Stadel, O., Schmidt, J., Wahl, G., Jimenez, C., Weiss, F., Krellmann, M., Selbmann, D., Markov, N.V., Samoylenkov, S.V., Gorbenko, O.Yu, Kaul, A.R.
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Sprache:eng
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Zusammenfassung:In a small scale MOCVD system YBCO films with j c(77 K) > 1 MA were deposited onto substrates, which were continuously moved through the deposition chamber. Two routes for the buffer layer deposition onto textured Ni tapes were chosen: a) CeO 2, LaMnO 3 and LaCrO 3 films were deposited in hydrogen atmosphere by MOCVD. On LaAlO 3 and R-Al 2O 3 crystals epitaxial films were obtained b) textured NiO layers were grown by oxidation of textured Ni tapes. Based on the small scale system an enlarged MOCVD reactor was constructed.
ISSN:0921-4534
1873-2143
DOI:10.1016/S0921-4534(00)01197-7