Continuous YBCO deposition onto moved tapes in liquid single source MOCVD systems
In a small scale MOCVD system YBCO films with j c(77 K) > 1 MA were deposited onto substrates, which were continuously moved through the deposition chamber. Two routes for the buffer layer deposition onto textured Ni tapes were chosen: a) CeO 2, LaMnO 3 and LaCrO 3 films were deposited in hydroge...
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Veröffentlicht in: | Physica. C, Superconductivity Superconductivity, 2000, Vol.341, p.2477-2478 |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | In a small scale MOCVD system YBCO films with j
c(77 K) > 1 MA were deposited onto substrates, which were continuously moved through the deposition chamber. Two routes for the buffer layer deposition onto textured Ni tapes were chosen: a) CeO
2, LaMnO
3 and LaCrO
3 films were deposited in hydrogen atmosphere by MOCVD. On LaAlO
3 and R-Al
2O
3 crystals epitaxial films were obtained b) textured NiO layers were grown by oxidation of textured Ni tapes. Based on the small scale system an enlarged MOCVD reactor was constructed. |
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ISSN: | 0921-4534 1873-2143 |
DOI: | 10.1016/S0921-4534(00)01197-7 |