Superconducting boron doped nanocrystalline diamond microwave coplanar resonator

A coplanar waveguide resonator (CPR) is presented for kinetic inductance (Lk) and penetration depth (λL) measurements of superconducting boron doped nanocrystalline diamond (B-NCD) at microwave frequencies of 0.4 to 1.2 GHz and at temperatures below 3 K. Using finite element modelling and experimental measurements, this work demonstrates that thin granular B-NCD films (thickness d≈ 500nm) on Si have a large penetration depth (λL≈3.8μm), and therefore an associated high kinetic inductance per square (Lk,□≈ 670 to 690 pH/□). These values are much larger than those typically obtained for films on single crystal diamond, which is likely due to the high granularity of the nanocrystalline films. Based on the measured Q factors of the structure, the calculated surface resistance is found to be around ≈ 1 to 6μΩ at T