Brookite-rich titania films made by pulsed laser deposition

Pulsed laser deposition has been used to prepare thin films of TiO 2 on silicon and other substrates. X-ray diffraction and Raman scattering results show that brookite is the main phase present in the films. Brookite has not previously been reported for pulsed laser deposited titania thin films.

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Veröffentlicht in:Thin solid films 2000-05, Vol.366 (1), p.8-10
Hauptverfasser: Moret, Mona P., Zallen, Richard, Vijay, Dilip P., Desu, Seshu B.
Format: Artikel
Sprache:eng
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Zusammenfassung:Pulsed laser deposition has been used to prepare thin films of TiO 2 on silicon and other substrates. X-ray diffraction and Raman scattering results show that brookite is the main phase present in the films. Brookite has not previously been reported for pulsed laser deposited titania thin films.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(00)00862-2