XTEM study of Al doped TiO2 anatase epitaxial films deposited on MgO by pulsed laser deposition

Al doped TiO2 anatase films epitaxially grown by Pulsed Laser Deposition (PLD) on MgO single crystal substrates have been studied by cross-section transmission electron microscopy. The main structural features of such films are the columnar morphology of the anatase grains and the formation of a spinel buffer layer at the TiO2/MgO interface. The spinel layer is Al rich and displays a steep gradient in Mg composition. Correlation between the microstructure and the optical properties of the films is presented also.