Young’s modulus of silver films

The Young's modulus E sub f of silver films was measured as a function of film thickness, d, in the thickness range between 6-150 nm. E sub f of Ag films shows good agreement with the bulk value for films thicker than 50 nm and a decrease with decreasing film thickness < 50 nm. A Ag mono-met...

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Veröffentlicht in:	Scripta materialia 1999-07, Vol.41 (4), p.443-448
Hauptverfasser:	Mizubayashi, H., Matsuno, J., Tanimoto, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties Metals. Metallurgy Physical properties of thin films, nonelectronic Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Zusammenfassung:	The Young's modulus E sub f of silver films was measured as a function of film thickness, d, in the thickness range between 6-150 nm. E sub f of Ag films shows good agreement with the bulk value for films thicker than 50 nm and a decrease with decreasing film thickness < 50 nm. A Ag mono-metal film < 50 nm thick and wide may not be safe for wiring of ULSI. Substrates: Si.
ISSN:	1359-6462 1872-8456
DOI:	10.1016/S1359-6462(99)00175-X