Gate controlled 2-DEG varactor for VCO applications in microwave circuits

A novel gate controlled Schottky diode varactor is introduced. The three-terminal varactor is a modulation-doped heterostructure of AlGaAs/GaAs with two Schottky contacts, similar to a metal–semiconductor–metal (MSM) diode. Schottky metal contacts are made to a two-dimensional electron gas (2-DEG). The third contact, the gate contact is formed from highly doped n+ GaAs material to allow an open optical window that can be used for optical gating and mixing. Structure capacitance is less than 1PF and a change of more than 30% from the zero bias capacitance is observed with the applied gate voltage. On the basis of our quasi two-dimensional C–V model, the layer structure and device dimensions can be optimized and scaled to cover a wide range of operations in the microwave and millimeter wave regimes.