Short-focus silicon parabolic lenses for hard X-rays

Short-focus silicon parabolic lenses for hard X-rays

Parabolic lenses have been formed by photoanodic etching of silicon in the form of profiles 22 μm deep and 5 μm in diameter. Observations with 17.46 keV radiation show that the focal length of the lenses is 7 cm and images with resolution of 3 μm have been obtained. A procedure to evaluate the quali...

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Veröffentlicht in:Optics communications 1999-03, Vol.161 (4), p.203-208
Hauptverfasser: Aristov, V.V., Starkov, V.V., Shabel'nikov, L.G., Kuznetsov, S.M., Ushakova, A.P., Grigoriev, M.V., Tseitlin, V.M.
Format: Artikel
Sprache:eng
Schlagworte:
Focusing
Lens
Refraction
X-ray
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Beschreibung
Zusammenfassung:Parabolic lenses have been formed by photoanodic etching of silicon in the form of profiles 22 μm deep and 5 μm in diameter. Observations with 17.46 keV radiation show that the focal length of the lenses is 7 cm and images with resolution of 3 μm have been obtained. A procedure to evaluate the quality of real refracting profiles is suggested.
ISSN:0030-4018
1873-0310
DOI:10.1016/S0030-4018(99)00039-5