Crystalline silicon thin films with porous Si backside reflector

Thin film crystalline Si solar cells on cheap Si-based substrates have a large potential in PV technology. Optical light confinement is a very crucial point of such thin film structures. Porous Si (PS) as a perfect light diffuser could be used as a backside reflector if its multi-layer structure would be preserved during the deposition of a thin Si film. That is why low-energy plasma enhanced chemical vapor deposition (LEPECVD) was chosen to deposit a thin Si film on a PS multilayer structure at low temperature and high deposition rate. This technique allows one to deposit a Si film with epitaxial quality on the top of PS without destroying its multi-layer structure as revealed by high-resolution X-ray diffraction and cross-sectional transmission electron microscopy (TEM). The epi-layers of 10 μm are grown at very high deposition rates (approx. 3 nm/s) at 590°C. TEM-analysis reveals that during the deposition a high density of defects forms at the PS/epi-Si interface and spreads through the whole epi-layer. The defect density is decreased when the deposition temperature is increased to 645°C. LEPECVD appears to be an appropriate deposition technique to grow thin Si films on cheap Si based substrates with PS reflector.