C49–C54 phase transition in nanometric titanium disilicide nanograins
The first order C49–C54 phase transition was studied in single TiSi 2 grains embedded in a Si matrix by transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700–1100 °C temperature range. T...
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| Veröffentlicht in: | Microelectronic engineering 2002-10, Vol.64 (1), p.189-196 |
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| container_title | Microelectronic engineering |
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| creator | Alessandrino, M.S Grimaldi, M.G La Via, F |
| description | The first order C49–C54 phase transition was studied in single TiSi
2 grains embedded in a Si matrix by transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700–1100
°C temperature range. The fraction of C54 increases with temperature and the steady state value is reached in times of ∼60 s. The data are interpreted in terms of heterogeneous nucleation at the silicide–silicon interface. |
| doi_str_mv | 10.1016/S0167-9317(02)00786-4 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_27066569</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0167931702007864</els_id><sourcerecordid>27066569</sourcerecordid><originalsourceid>FETCH-LOGICAL-c368t-633f4da7760dfe9fa01ff2d6c6ca8d2f80bbdb5a24d14ead0a7b414c961adcb73</originalsourceid><addsrcrecordid>eNqFkM1KxDAQgIMouK4-gtCLoodq0qRJexJZdBUWPKjnMM2PjnTTNekK3nwH39AnsbsrevQywzDfzDAfIYeMnjHK5Pn9EFRec6ZOaHFKqapkLrbIiFWK52Upq20y-kV2yV5KL3SoBa1GZDoR9dfH56QU2eIZksv6CCFhj13IMGQBQjd3fUST9dhDwOU8s5iwRYPWrdtPETCkfbLjoU3u4CePyeP11cPkJp_dTW8nl7PccFn1ueTcCwtKSWq9qz1Q5n1hpZEGKlv4ijaNbUoohGXCgaWgGsGEqSUDaxrFx-R4s3cRu9elS72eYzKubSG4bpl0oaiUpawHsNyAJnYpRef1IuIc4rtmVK-06bU2vXKiaaHX2rQY5o5-DkAy0PpBh8H0N8xrXkouB-5iw7nh2zd0USeDLhhnMTrTa9vhP5e-AQpcg2I</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>27066569</pqid></control><display><type>article</type><title>C49–C54 phase transition in nanometric titanium disilicide nanograins</title><source>Elsevier ScienceDirect Journals</source><creator>Alessandrino, M.S ; Grimaldi, M.G ; La Via, F</creator><creatorcontrib>Alessandrino, M.S ; Grimaldi, M.G ; La Via, F</creatorcontrib><description>The first order C49–C54 phase transition was studied in single TiSi
2 grains embedded in a Si matrix by transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700–1100
°C temperature range. The fraction of C54 increases with temperature and the steady state value is reached in times of ∼60 s. The data are interpreted in terms of heterogeneous nucleation at the silicide–silicon interface.</description><identifier>ISSN: 0167-9317</identifier><identifier>EISSN: 1873-5568</identifier><identifier>DOI: 10.1016/S0167-9317(02)00786-4</identifier><identifier>CODEN: MIENEF</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Clusters ; Condensed matter: structure, mechanical and thermal properties ; Exact sciences and technology ; Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals ; Nucleation ; Phase transformation ; Physics ; Structure of solids and liquids; crystallography ; TiSi 2 ; X-ray</subject><ispartof>Microelectronic engineering, 2002-10, Vol.64 (1), p.189-196</ispartof><rights>2002 Elsevier Science B.V.</rights><rights>2002 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c368t-633f4da7760dfe9fa01ff2d6c6ca8d2f80bbdb5a24d14ead0a7b414c961adcb73</citedby><cites>FETCH-LOGICAL-c368t-633f4da7760dfe9fa01ff2d6c6ca8d2f80bbdb5a24d14ead0a7b414c961adcb73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0167931702007864$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,3537,23909,23910,25118,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=13935636$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Alessandrino, M.S</creatorcontrib><creatorcontrib>Grimaldi, M.G</creatorcontrib><creatorcontrib>La Via, F</creatorcontrib><title>C49–C54 phase transition in nanometric titanium disilicide nanograins</title><title>Microelectronic engineering</title><description>The first order C49–C54 phase transition was studied in single TiSi
2 grains embedded in a Si matrix by transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700–1100
°C temperature range. The fraction of C54 increases with temperature and the steady state value is reached in times of ∼60 s. The data are interpreted in terms of heterogeneous nucleation at the silicide–silicon interface.</description><subject>Clusters</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Exact sciences and technology</subject><subject>Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals</subject><subject>Nucleation</subject><subject>Phase transformation</subject><subject>Physics</subject><subject>Structure of solids and liquids; crystallography</subject><subject>TiSi 2</subject><subject>X-ray</subject><issn>0167-9317</issn><issn>1873-5568</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqFkM1KxDAQgIMouK4-gtCLoodq0qRJexJZdBUWPKjnMM2PjnTTNekK3nwH39AnsbsrevQywzDfzDAfIYeMnjHK5Pn9EFRec6ZOaHFKqapkLrbIiFWK52Upq20y-kV2yV5KL3SoBa1GZDoR9dfH56QU2eIZksv6CCFhj13IMGQBQjd3fUST9dhDwOU8s5iwRYPWrdtPETCkfbLjoU3u4CePyeP11cPkJp_dTW8nl7PccFn1ueTcCwtKSWq9qz1Q5n1hpZEGKlv4ijaNbUoohGXCgaWgGsGEqSUDaxrFx-R4s3cRu9elS72eYzKubSG4bpl0oaiUpawHsNyAJnYpRef1IuIc4rtmVK-06bU2vXKiaaHX2rQY5o5-DkAy0PpBh8H0N8xrXkouB-5iw7nh2zd0USeDLhhnMTrTa9vhP5e-AQpcg2I</recordid><startdate>20021001</startdate><enddate>20021001</enddate><creator>Alessandrino, M.S</creator><creator>Grimaldi, M.G</creator><creator>La Via, F</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20021001</creationdate><title>C49–C54 phase transition in nanometric titanium disilicide nanograins</title><author>Alessandrino, M.S ; Grimaldi, M.G ; La Via, F</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c368t-633f4da7760dfe9fa01ff2d6c6ca8d2f80bbdb5a24d14ead0a7b414c961adcb73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Clusters</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Exact sciences and technology</topic><topic>Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals</topic><topic>Nucleation</topic><topic>Phase transformation</topic><topic>Physics</topic><topic>Structure of solids and liquids; crystallography</topic><topic>TiSi 2</topic><topic>X-ray</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Alessandrino, M.S</creatorcontrib><creatorcontrib>Grimaldi, M.G</creatorcontrib><creatorcontrib>La Via, F</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronic engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Alessandrino, M.S</au><au>Grimaldi, M.G</au><au>La Via, F</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>C49–C54 phase transition in nanometric titanium disilicide nanograins</atitle><jtitle>Microelectronic engineering</jtitle><date>2002-10-01</date><risdate>2002</risdate><volume>64</volume><issue>1</issue><spage>189</spage><epage>196</epage><pages>189-196</pages><issn>0167-9317</issn><eissn>1873-5568</eissn><coden>MIENEF</coden><abstract>The first order C49–C54 phase transition was studied in single TiSi
2 grains embedded in a Si matrix by transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700–1100
°C temperature range. The fraction of C54 increases with temperature and the steady state value is reached in times of ∼60 s. The data are interpreted in terms of heterogeneous nucleation at the silicide–silicon interface.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/S0167-9317(02)00786-4</doi><tpages>8</tpages></addata></record> |
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| ispartof | Microelectronic engineering, 2002-10, Vol.64 (1), p.189-196 |
| issn | 0167-9317 1873-5568 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Clusters Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals Nucleation Phase transformation Physics Structure of solids and liquids crystallography TiSi 2 X-ray |
| title | C49–C54 phase transition in nanometric titanium disilicide nanograins |
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