Plasma surface engineering — innovative processes and coating systems for high-quality products
The paper will inform about new results in research into and the application of plasma-assisted processes such as reactive magnetron sputtering, plasma CVD, plasma cleaning and activation, and plasma diffusion treatment. Typical examples from selected industrial areas will give an impression of the...
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Veröffentlicht in: | Surface & coatings technology 1999-02, Vol.112 (1), p.351-357 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The paper will inform about new results in research into and the application of plasma-assisted processes such as reactive magnetron sputtering, plasma CVD, plasma cleaning and activation, and plasma diffusion treatment. Typical examples from selected industrial areas will give an impression of the wide application-potential of these innovative techniques. Examples will include the deposition of wear and chemical-resistant coatings on lightweight polycarbonate glass for cars, tribological coatings on motor and gear components, plasma cleaning and activation of aerospace components, and the fabrication of high-temperature-resistant coating systems for various applications. |
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ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/S0257-8972(98)00833-0 |