Characterization of Secondary Phases in Lead Zirconate Titanate Film Surface Deposited with Excess Lead Content

The characterization of secondary phases in PZT film surface deposited with excess Pb content has been carried out using high-voltage TEM. The HRTEM images indicate that the PZT surface was largely covered with the Pb-rich amorphous phase and a small amount of pyrochlore phase among the PZT grains. The particle size of pyrochlore phase is about 2.5-3 nm. The Pb-rich PZT surface in AES depth profile seems to be attributed to the existence of the Pb-rich amorphous phase. 18 refs.