3-D simulation of electrostatic-mechanical transducers using algebraic multigrid

A finite-element (FE) simulation scheme which allows the efficient calculation of electrostatic tranducers immersed in an acoustic fluid is presented. Therewith, the full coupling between the electric, mechanical, and acoustic field is taken into account. Since the entries of the electric system matrix (obtained by the FE method) vary as a function of the mechanical displacement, the algebraic system of equations for the electrostatic problem is solved by an appropriate algebraic multigrid method.